Abstract: To enhance the etch profile fidelity in advanced 3D flash memory, a cryogenic plasma etching process is employed for the channel hole etch layer. Controlling wafer level temperature and ...
Abstract: Micro-acoustic radio frequency (RF) filters have become the technology of choice for precise frequency band selection in modern mobile communication equipment. Surface Acoustic Wave (SAW) ...
The cassette line incorporates static-dissipative grades of polyether ether ketone with controlled surface resistance intended for electrostatic charge dissipation during wafer handling and transfer ...
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